CS210 熱式數(shù)字氣體質(zhì)量流量控制器是一款數(shù)模兼容的熱式原理產(chǎn)品，可廣泛應(yīng)用于光伏、燃料電池、真空等行業(yè)，用于控制工藝制程的氣體流量，具有高精度、高穩(wěn)定性、低零漂等特點。
創(chuàng)新點
VCP的閥控技術(shù)
恒功率傳感器
數(shù)字傳感器補(bǔ)償技術(shù)
應(yīng)用領(lǐng)域
半導(dǎo)體照明
特種工業(yè)—石油化工
特種工業(yè)—光纖
特種工業(yè)—真空鍍膜
特種工業(yè)—熱處理
生命科學(xué)—環(huán)境保護(hù)
生命科學(xué)—食品工業(yè)
生命科學(xué)—生物工程
生命科學(xué)—醫(yī)療健康
生命科學(xué)—分析儀器
科學(xué)研究—實驗器材
技術(shù)指標(biāo)
| 型號 | CS210 | |||||
| 類號 | A | C | D | |||
| 流量規(guī)格(N?) | (0~5,10,20,30,50,100,200,300,500)SCCM(0~1,2,3,5,10,20,30,50)SLM | (0~2,3,5,10,20,30,50,100,200,300,500)SCCM(0~1,2,3,5,10,20,30)SLM | ||||
| 準(zhǔn)確度 | Type:±1.0%S.P.(≥35% F.S.);±0.35%F.S.(<35%F.S.) Special; ±0.8% S.P.(≥35% F.S.);±0.3% F.S.(<35% F.S.) | |||||
| 線性 | ±0.5% F.S. | |||||
| 重復(fù)精度 | ±0.2% F.S. | |||||
| 響應(yīng)時間 | ≤1sec | ≤0.8 sec(SEMI E17-0600) | ||||
| 閥類型 | Normally Closed or Normally Open (F.S.≤30slm) | No Valve | Normally Closed or Normally Open | No Valve | Normally Closed or Normally Open | No Valve |
| 工作壓差范圍 | 0.05~0.35MPa(Flow≤10slm)0.1~0.35MPa(10slm | <0.02MPa | (0.05~0.35)MPa(≤10slm)
(0.1~0.35)MPa(>10slm) | <0.02MPa | (0.05~0.35)MPa(≤10slm)
(0.1~0.35)MPa(>10slm) | <0.02MPa |
| 工作壓力 | 0.45MPa | |||||
| 溫度系數(shù) | Zero:≤±0.05% F.S./℃;
Span:≤±0.1% F.S./℃ (Flow≤30slm)
Span:≤±0.2% F.S./℃ (Flow>30slm) | Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ | ||||
| 耐壓 | 3MPa (435pisg) | |||||
| 漏率 | 1×10-9atm·cc/sec He | 1×10-10atm·cc/sec He | ||||
| 密封材料 | Viton | Metal(Stainless Steel V/V,5Ra) | Metal | |||
| 表面化學(xué)成分 | —— | Cr/ Fe ratio>2.0;
CrO thickness>20 Angstroms | —— | |||
| 表面粗糙度 | 25 μinch Ra | 10μinch Ra | 25 μinch Ra | |||
| 工作環(huán)境溫度 | (5~45)℃ | (0~50)℃ | ||||
| 輸入信號 | Digital: RS485 or EtherCAT Analog: 0~5V/4~20mA | N/A | Digital: RS485 or EtherCAT Analog: 0~5V/4~20mA | N/A | Digital: RS485 or EtherCAT Analog: 0~5V/4~20mA | N/A |
| 輸出信號 | Digital: RS485 or EtherCAT; Analog: 0~5V/4~20mA | |||||
| 電源 | ±8~±16VDC(雙極);+20.4~+26.4 VDC (單級) | |||||
| 電氣連接 | 9 pin male sub-D,15 pin male sub-D, EtherCAT | |||||
| 標(biāo)準(zhǔn)接頭形式 | VCR1/4" M;VCO1/4" M;A-sael;
Compression Fittingφ10; Compression Fittingφ6;
Compression Fitting 3/8"; Compression Fittingl/4";
Compression Fittingl/8"; Compression Fittingφ3;
φ6(inner)×1hose;φ5(inner)×1.5hose;φ4(inner)×1hose; | VCR1/4" M; Compression Fittingφ6;
Compression Fittingφ3; Compression Fittingl/4";
W-seal; C-seal | ||||
| 重量 | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg |
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